Overview
EII starts the business with Semiconductor automation system, it has definitive standards for diagnostic testingautomation equipment repair and refurbishment. Our robot service covers a lot of type including PRIBrooksRorzeMECSJEL
level-one representative of Centrotherm photovoltaics AG
In semiconductor field, Centrotherm product portfolio includes production systems for thermal processes, such as annealing, oxidation, diffusion, LPCVD,PECVD.They are successfully employed in the semiconductor industry worldwide, offering high-quality process results, low operating costs and maximum throughput. Centrotherm furnace provides a high degree of flexibility for all standard atmospheric and low pressure processes up to 300mm wafers and 200 wafers per batch.
representative of Centrotherm Clean Solutions
EII has extensive cooperation with Centrotherm clean solutions in new energymedicine manufacturer and semiconductor industry, We already have a lot of applications for the treatment of waste gases interiorly, such as SuntechNECASMC and Simgui etc.
representative of Oxford Instruments Austin
We have built up cryopump overhual center in Shanghai according to the authorization by Austin Scientific USA.Now we can supply comprehensive refurbishment and overhaul for CTIAustin OEM pumps.
representative of BINDER-tecsys Kontakte
We have cooperation with BINDER-tecsys Kontakte in the IGBT and power device packaging.
Robot
We provide GenmarkMECSPRI/EquipBrooksRorzeJEL Overhaul.
Business Scope
Business ScopeCentrotherm oxidationCentrotherm Activator 150Centrotherm LPCVDCentrotherm PECVDVLO6VLO12VLO20VLO180VLO300ScrubberCryo pump & CompressorRobotControllerAligner |
| Product VLO20VLO180VLO300 Verticoo200Oxidator 150Activator 150Scrubber LPCVDPECVDMECS RobotMECS controllerBrooks Z-BotBrooks AlignerRorze RobotRorze Controller PRI RobotPRI ControllerGenmark RobotGenmark ControllerPre AlignerPre ControllerCryo pump & Compressor |