Ҫྻ͵ĸĴʽĤռģ⡢Ӧ˵Cryo-Plex 16 ±һá
ISOCVCȷӿ
Austin ScientificCryo-Plex ϵе±áѹHelixƷƵCryoTorrϵе±áѹݺ滻Ӷʹάޡȷ
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| Cryo-Plex 16 - Gas pumping speeds liters/second |
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| Air |
5,000 |
| Water |
16,000 |
| Hydrogen |
5,000 |
| Argon |
4,200 |
| Gas capacities - standard liters @ 5x10-6 Torr |
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| Hydrogen |
15 |
| Argon |
2,500 |
| Throughput |
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| Argon sccm |
500 |
| Crossover |
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| Torr-liters |
300 |
| Cool down time |
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| 60 Hertz |
120 Min |
| Cryopump measurements |
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| Height |
24 " |
| Length |
22.6" |
| Inlet flange |
ISO/CVC |
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* ۽ƼʱҪԲƷĵȨ ˡ֪ͨ
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