зĽྻ͵ĸϵͳCyro-Plex8±DZãҼ۸Żݡ
Ӧ䡢ע롢Ӽз͵ʽϵͳԼϵͳ
ANSIISOCFȶַӿ
Austin ScientificCryo-Plex ϵе±áѹHelixƷƵCryoTorrϵе±áѹݺ滻Ӷʹάޡȷ
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| Cryo-Plex 8 - Gas pumping speeds liters/second |
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| Air |
1,500 |
| Water |
4,000 |
| Hydrogen |
2,500 |
| Argon |
1,200 |
| Gas capacities - standard liters @ 5x10-6 Torr |
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| Hydrogen |
18 |
| Argon |
1,000 |
| Throughput |
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| Argon sccm |
700 |
| Cool down time |
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| 60 Hertz |
90 Min |
| Cryopump measurements |
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| Height |
20.7" |
| Weight LBS |
45 |
| Inlet flange |
ANSI/ISO/CF |
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* ۽ƼʱҪԲƷĵȨ ˡ֪ͨ
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